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素玻璃基板檢測系統

素玻璃基板檢測系統
   檢測項目

 

        圓洞/弧度半徑尺寸量測精度 30 um(尺寸量測資料點個數>100)

        直線尺寸量測精度 30 um(尺寸量測資料點個數>100)

        外型尺寸量測精度 40 um

        邊緣區域內縮或凸出 40 um,寬度> 40um檢出,弧線區域則依導角變化而定,基本上檢出缺陷>70um

        邊緣導角/圓洞導角變化 40 um檢出,但導角本身尺寸不可再有可容忍的尺寸變化

        髒污/刮傷檢測出尺寸 30 um x 30 um

 
                
 
 
 
 
 
2014.01.01

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